AHL9000 Hybrid-Bearing Direct-Drive XY Linear Stage
Description
Design Features
- Air-bearing scan axis; mechanical-bearing step axis
- 双线电机驱动的步进轴
- Travel to 1.2 meter by 1.2 meter
- Linear encoder or laser interferometer feedback
The AHL9000 is the latest addition to Aerotech’s family of air-bearing stages and is an excellent choice for applications that require careful balancing of price and performance. This stage has been designed for demanding applications that require excellent step and scan performance. Applications include wafer inspection, flat panel display manufacturing and optical inspection and fabrication.
Hybrid-Bearing Design
The AHL9000’s scan axis was designed using proven air-bearing technology developed for the ABL9000 planar air bearing. This axis uses active preload on both the vertical and horizontal surfaces in order to provide outstanding stiffness and dynamic performance. The AHL9000 also takes advantage of the cost-effectiveness of a mechanical bearing step axis. The combination of these two bearing technologies in one stage provides a system that is optimized for step and scan operation.
线性电机驱动
The driving force behind this stage is Aerotech’s BLM series brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this latest design. The BLM utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLM represents the ultimate combination of power and performance.
High Performance
Noncontact linear encoders with submicron repeatabilities are standard on all AHL9000 series stages. Optional 2D factory calibration is available to further increase the standard accuracy, straightness and yaw specifications to even finer precision.
Cable Management
We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime.
为了便于整合到最终系统中，我们包括在我们的CMS捆绑中的所有客户所需的电缆，空气软管等。两端都是完全连接的，以便在客户的机器中简单地集成。
Specifications
AHL9000 Specifications
| Basic Model | AHL90350-350 | |
|---|---|---|
| Travel | 350 mm x 350 mm | |
| Drive System | Linear Brushless Servomotor (Bridge Axis:BLM-264-A; Gantry Axis:BLM-203-A) |
|
| Bus Voltage | up to 160 VDC | |
| Continuous Current (Bridge Axis) |
APK. | up to 5.10 A |
| Arms. | up to 3.61 A | |
| Continuous Current (Gantry Axis) |
APK. | 高达5.30 a |
| Arms. | 高达3.75 a | |
| 反馈 | Noncontact Linear Encoder (LT or LN) | |
| 解析度 | 0.0005µm - 1.0µm | |
| Maximum Travel Speed(1) | 1000 mm/s | |
| 最大加速度 | 1.0 g (No Load) | |
| Maximum Load(2) | 30.0 kg | |
| 准确性(3) | LT | ±1.5 µm |
| LN | ±1.0 µm | |
| Repeatability(3) | LT | ±0.5 µm |
| LN | ±0.2 µm | |
| 直线度（y轴） | Max Deviation | 0.6 µm |
| 平坦 | Max Deviation | 0.6 µm |
| Pitch/Roll/Yaw | 3 arc sec | |
| Stage Mass | 535千克 | |
| 移动质量 | Bridge | 9.7千克 |
| Gantry | 34.0 kg | |
| Orthogonality | 2 arc sec | |
| Operating Pressure(4) | 551.6 kPA +0, -34 kPa | |
| 耗气量(5) | 33 SLPM（1.17 SCFM） | |
| Material(6) | 运算器minum | |
| 完 | 硬涂层（62个罗克韦尔硬度） | |
- Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
- Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
- Available with Aerotech controllers and HALAR calibration option.
- To protect air bearing against under-pressure, an in-line pressure switch tied to motion controller ESTOP input is recommended.
- Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
- Optional construction materials include ceramic, invar, stainless and titanium.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.